Scalable manufacturing of optical metasurfaces in the visible using engineered optical materials (Invited Paper)

We demonstrate low-cost, scalable manufacturing of optical metasurfaces using three approaches: dielectric particle-embedded resin, low-loss hydrogenated amorphous silicon (a-Si:H), and high-index ALD structural resin. These create effective metasurfaces across infrared, visible, and ultraviolet spectra. High efficiencies are achieved: 90.6% (a-Si, 940 nm), 47% (TiO2, 532 nm), 60% (ZrO2 PER, 325 nm), and 30% (ZrO2 PER, 248 nm). Engineered low-loss a-Si:H enables efficient beam-steering metasurfaces across the visible spectrum. Hybrid ALD structural resin with deep-UV lithography produces highly efficient visible metalenses (up to 77.8% efficiency). This approach extends to UV metalenses using ZrO2 ALD. These methods enable low-cost, large-area manufacturing of efficient optical metasurfaces across various wavelengths, advancing metasurface-based photonic device commercialization.