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23 - 27 February 2025
San Jose, California, US

Attend to hear research, challenges, and breakthroughs as you gather with colleagues in San Jose

Join other leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.
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Notable speakers from around the globe: meet the plenary speakers


Explore six great conferences

  • Optical and EUV Nanolithography
  • DTCO and Computational Patterning
  • Metrology, Inspection, and Process Control
  • Novel Patterning Technologies
  • Advances in Patterning Materials and Processes
  • Advanced Etch Technology and Process Integration for Nanopatterning

Five days of exciting content and connecting with your community

  • Plenary talks
  • Technical presentations
  • Networking sessions
  • Course offerings
  • Exhibition

Add a course to your conference experience


Choose from a selection of highly valuable topics

Advance your career and expand your skill set with instructional opportunities. Several courses will be available in San Jose.

Exhibition at Advanced Lithography + Patterning


Connect with the semiconductor community

The exhibition at Advanced Lithography + Patterning is where people gather to collaborate and get business done. Find these technology solutions and more:
• Photoresist, EUV, and other specialty materials
• E-beam lithography systems
• Precision cleaning, contamination, transport support materials
• Wafer treatments and substrates

Opportunities for students


Students: Learn how to attend this event for free

SPIE Advanced Lithography + Patterning offers numerous opportunities for students to engage with and learn about the semiconductor industry, as well as share their latest research in lithography and photomask technologies. Leading companies support student participation through grants and awards, and tech groups offer scholarships for graduate and undergraduate applicants.

Learn about career opportunities


Watch a webinar recording from the semiconductor lithography community

Check out this webinar recording covering the basics of semiconductor lithography and available careers in the field. Opportunities for students to apply for full funding to attend the event in Feburary are also included in the discussion.

Watch to learn more!

Stay involved


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