Fabrication and applications of 3D large-sized and high-precision glass objects by ultrafast laser volume processing (Invited Paper)

Centimeter-sized and micrometer-precision glass structures with three-dimensional (3D) internal configurations have numerous potential applications in various fields of science and engineering, including high-throughput continuous-flow synthesis and biomimetic manufacturing. However, fabricating these structures using conventional microfabrication technologies remains a great challenge. We demonstrate our recent progress in advanced fabrication techniques for producing large, precise 3D glass objects through ultrafast laser volume processing. Our advancements include the creation of a 3D centimeter-scale glass hand with an encapsulated free-form glass microchannel, the development of low-loss optofluidic devices embedded in glass, the fabrication of long, compact glass microchannels with meter-scale lengths and straight-sided elliptical cross-sections, and the production of high aspect-ratio glass structures with large depths.