CMOS-compatible Al2O3 low loss waveguides for ultraviolet photonics integrated circuits

Aluminium Oxide (Al₂O₃) UV waveguides were fabricated in a 200 mm CMOS pilot-line. Single mode waveguides losses were measured to be 0.6±0.17 dB/cm and 0.2±0.04 dB/cm for UV and blue wavelengths. These waveguides have been fabricated along with other passive elements such as power splitters and couplers. Additionally, the thermal heaters as active elements have been realized with a ΔPπ of 57.6±0.2 mW.