Dr. Linyong Pang

Fellow Member | Chief Executive Officer and EVP at D2S Inc
Pang, Linyong
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SPIE Membership: 19.4 years
SPIE Awards: Fellow status | Senior status | 2020 SPIE Community Champion
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Area of Expertise: Inverse lithography technology (ILT), OPC, Semiconductor, Computational lithography, Computational inspection, EDA
Websites: Company Website
Social Media: LinkedIn
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Profile Summary

Dr. Linyong (Leo) Pang is currently the Chief Product Office and Executive Vice President at D2S, Inc.. Prior to D2S, Dr. Pang was the GM and sole Sr. Vice President of Luminescent Technologies. Dr. Pang joined the Luminescent executive team from its beginning in 2004 and played leadership roles with products, technologies, marketing, and customers until its final acquisition by KLA-Tencor. He is most widely known as the person that introduced curvilinear inverse lithography technology (ILT, which acronym he coined) to the lithography and photomask world. He founded and was the GM of the Computational Lithography division of Luminescent (acquired by Synopsys in 2012) as well as the Computational Metrology and Inspection division (acquired by KLA-Tencor in March 2014). His pioneering work in EDA and Semiconductor started back 2000, and as the inventor of the Numerical Technologies i-Virtual Stepper System, which was given the “2001 Editors' Choice Best Product Award” by Semiconductor International. Prior to joining Luminescent, Dr. Pang held several product development and marketing management positions at Numerical Technologies and Synopsys (after acquisition), and a research scientist position at Acuson. To date, Dr. Pang has 38 issued patents, 27 pending patents, and 85 publications. Dr. Pang received his Ph.D. in Mechanical Engineering and an additional M.S. in Computer Science from Stanford University.

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