Paper 13350-34
Paper 13350-34
Performance limit of wet laser cleaning processes for nanoscale particle removal
28 January 2025 • 6:00 PM - 8:00 PM PST | Moscone West, Room 2003 (Level 2)
Abstract
This study analyzed the lower size limit of particle removal for Laser-induced Spray Jet Cleaning (LSJC) and steam laser cleaning (SLC). Although it has been long since these methods were developed, with the shift in primary target size towards the sub-10-nm range, reassessment of these two cleaning methods is necessary. Since previous studies have mostly been focused on relatively large particles, the processes have not been optimized for nanoscale particles. Consequently, this study aimed to optimize the cleaning processes through numerical simulation and experiment and to identify the smallest particle sizes that can be removed from a silicon surface. For SLC, the lower size limit, based on a 90 % Particle Removal Efficiency (PRE) criterion, was 3 nm for gold particles but much larger for other particles. In LSJC, the lower size limit was 2 nm regardless of the particle type.
Presenter
Dongsik Kim
Pohang Univ. of Science and Technology (Korea, Republic of)
Professor Dongsik Kim received his Ph. D. degree from UC Berkeley (USA) in 1998. After serving as an Assistant Professor at UT Austin (USA) for two years, he joined Pohang University of Science and Technology (POSTECH) in Republic of Korea and is currently a professor in the Mechanical Engineering Department. His main research interests lie in laser materials processing, with emphasis on metal 3D printing, surface cleaning/modification, and modeling and simulation of laser interaction with materials. He published numerous archival journal papers and won several awards, including the inaugural Kwangwon Award from KSLP and the Netzsch KSTP Thermophysical Properties Award.