Multiscale analysis on direct laser written structures to enhance calibration processes

Since the latest ISO 25178 publication, calibration of areal measuring instruments has been fully documented, emphasizing its importance all over. We previously highlighted the advantages of direct laser written calibration structures, such as design freedom, high resolution, and thermal stability, leading to an universal calibration artifact for all ISO-based metrological characteristics. Now, we report on extensive international comparison measurements to apply multiscale analysis (MSA) to direct laser written structures for the first time. Generally, MSA characterizes surface topographies across several scales, crucial when calibration standard and measuring device operate on different size scales. Specifically, areal and volumetric analysis methods were used to investigate the transfer behaviour of areal measuring instruments. We found a clear correlation between MSA results and ISO-conform metrological characteristics, linking scale-dependent transfer behaviour, resolution limits, and the ability to capture large surface angles. These findings suggest that MSA enhances performance verification and uncertainty determination of areal surface topography measuring instruments.