BACUS Technical Group

Join BACUS today!

BACUS (Bay Area Chromium Users Society) is an international professional organization for mask makers, equipment suppliers, and mask users, dedicated to advancing the technology and commercial application of masks for microlithography.

Two BACUS members smiling and networking at an SPIE event

Find on this page:

BACUS Monthly News

Monthly community updates

Covering current business and technical issues for the photomask community. Visit the BACUS News page to view the current issue and browse archives.

Front pages of three BACUS newsletters

BACUS Scholarship

Support for students

BACUS sponsors a yearly scholarship to a full-time undergraduate or graduate student in the field of microlithography with an emphasis on optical tooling and/or semiconductor manufacturing technologies.

Smiling attendee at an SPIE event

BACUS-sponsored webinars

An overview of photomask technology

Leading experts from the BACUS community provide an introduction to photomask technology and discuss opportunities for students.

What can nanoimprint lithography do with the development of templates?

In this Webinar, nanoimprint lithography (NIL) template development work will be reviewed from the high resolution template fabrication point of view. In addition, several achievements in fabricating dual damascene 3-D templates will be presented, as well as other 3-D templates for non-semiconductor applications of NIL. Presentation given by Koji Ichimura of Dai Nippon Printing Co., Ltd.

Carbon nanotube pellicles for EUV lithography

This webinar explains the importance of carbon nanotube pellicles.

Full access to all previous webinars

Never miss another webinar you wished you'd attended. Access the full archive of past webinars with a free SPIE account. 

By creating a free SPIE account, you will have access the the full archive of SPIE webinar recordings on many important topics. You can also update your preferences to receive newsletters that keep you connected with your technical community. Sign up for a free SPIE account and enjoy access to research, discoveries in emerging technology, and updates from engineering project from around the globe. 

Sign up or sign in now

BACUS yearly membership investment

Individual

With SPIE Membership $25
No SPIE Membership $50
Benefits include:
  • Subscription to BACUS News (monthly)
  • Eligibility to hold office on BACUS Steering Committee

Join or Renew

Not an SPIE Member? Download BACUS membership form.

Corporate

With SPIE Corporate Membership $180 – $600*
Benefits include:
  • Subscription to BACUS News (monthly)
  • Listed as a Corporate Member in the BACUS Monthly Newsletter
  • Promotional signage at either/both SPIE Advanced Lithography and SPIE Photomask conferences.

Join or Renew

*Depends on company size and revenue.

About BACUS

Founded in 1980 by a group of chrome blank users wanting a single voice to interact with suppliers, BACUS has grown to become the largest and most widely known forum for the exchange of technical information in the field of photomask applications, manufacturing, research, and development. BACUS joined SPIE in January of 1991 to expand the exchange of information with photomask manufacturers around the world as well as with the external design enhancement community and end users of the products.
 
The group sponsors an informative monthly meeting and newsletter, BACUS News. The SPIE/BACUS Annual Photomask Technology Symposium covers photomask technology focused on the infrastructure necessary to advance and enhance the technology going forward. This includes fundamental photomask processes; materials, resist, lithography, etch, clean, metrology, inspection, repair, quality, and manufacturing management. In addition, phase shift mask technology for enhanced imaging for critical layer patterning has opened opportunities to collaborate with the lithography community and has been well integrated into the charter of the BACUS group. Forward looking concepts of design for manufacturing involving photomask technology is currently well under way with extensive activity in rigorous simulations of true photomask optical and physical attributes.
 
The evolution of BACUS into a synergistic organization of design, application, and photomask manufacturing is an exciting opportunity to bridge several interactive fields. BACUS continues to promote this effort through a strong community consisting of individuals who are interested in further integrating technology to drive the community forward.

Current BACUS leadership

BACUS Steering Committee

  • President: Jed Rankin, IBM Research
  • Vice President: Henry Kamberian, Photronics, Inc.
  • Secretary: Vidya Vaenkatesan, ASML Netherlands BV
  • Newsletter Editor: Artur Balasinski, Infineon Technologies
  • SPIE Photomask + Technology Conference Chairs: Ted Liang, Intel Corp.; Seong-Sue Kim, Yonsei University

Members at Large:

  • Frank E. Abboud, Intel Corp.
  • Uwe F. W. Behringer, UBC Microelectronics
  • Ingo Bork, Siemens EDA
  • Tom Cecil, Synopsys, Inc.
  • Brian Cha, Entegris Korea
  • Aki Fujimura, D2S, Inc.
  • Emily Gallagher, imec
  • Jon Haines, Micron Technology Inc.
  • Bryan Kasprowicz, HOYA
  • Romain J Lallement, IBM Research
  • Takaharu Nagai, Dai Nippon Printing
  • Kent Nakagawa, Toppan Photomasks, Inc.
  • Patrick Naulleau, EUVL
  • Jan Hendrik Peters, bmbg consult
  • Stephen Renwick, Nikon
  • Douglas J. Resnick, Canon Nanotechnologies, Inc.
  • Thomas Scheruebl, Carl Zeiss SMT GmbH
  • Ray Shi, KLA Corp.
  • Anthony Vacca, Automated Visual Inspection
  • Michael Watt, Shin-Etsu MicroSi Inc.
  • Larry Zurbrick, Keysight Technologies, Inc.

Exhibition and Sponsorship Coordinator:

  • Melissa Valum, SPIE Sales Representative, Exhibitions and Sponsorships

BACUS Technical Group Manager:

  • Tim Lamkins, SPIE