29 September - 3 October 2024
Monterey, California, US

Abstract submission guidelines

Present your research at SPIE Photomask Technology + EUV Lithography

Below are abstract submission instructions, the accompanying submission agreement, conference presentation guidelines, and guidelines for publishing in the Proceedings of SPIE in the SPIE Digital Library. Post-deadline abstract submissions will be considered and subject to chair approval.

Browse call for papers

Important dates


Abstracts due 15 May 2024
Registration opens July 2024
Authors notified and program posts online 8 July 2024
Student grant applications due 15 July 2024
Submission system opens for manuscripts and poster PDFs* 29 July 2024
Post-deadline abstracts due 12 August 2024
Poster PDFs due for spie.org preview and publication 4 September 2024
Manuscripts due 11 September 2024

*Contact author or speaker must register prior to uploading

How-to guide for successful abstract submission


What you will need to submit

  • Presentation title
  • Author(s) information
  • Speaker biography (1000-character max including spaces)
  • Abstract for technical review (200-300 words; text only)
  • Summary of abstract for display in the program (50-150 words; text only)
  • Keywords used in search for your paper (optional)
  • Check the individual conference call for papers for additional requirements (i.e., special abstract requirements or instructions for award competitions)

Note: Only original material should be submitted. Commercial papers, papers with no new research/development content, and papers with proprietary restrictions will not be accepted for presentation.


How to submit your abstract

  • Browse the conference topics to review the conferences
  • Choose one conference that most closely matches the topics of your abstract. You may submit more than one abstract, but submit each abstract only once
  • Click the title of the conference to view the full description and submit by clicking the "Submit An Abstract" button on that page
  • Sign in to your SPIE account, or create an account if you do not already have one
  • Follow the steps in the submission wizard until the submission process is completed


Submission agreement

All presenting authors, including keynote, invited, oral, and poster presenters, agree to the following by submitting an abstract:

  • Register and pay the conference registration fee
  • Agree to receive email messaging for the conference series
  • Oral presenters: agree to recording and publication of your onsite presentation (slides synched with voice) in the Proceedings of SPIE in the SPIE Digital Library
  • Poster presenters: one person may not present more than two posters in a poster session; submit a poster PDF for preview in the online program (web and app) and for publication in the Proceedings of SPIE in the SPIE Digital Library
  • Submit a manuscript by the advertised due date for publication in the Proceedings of SPIE in the SPIE Digital Library
  • Obtain funding for registration fees, travel, and accommodations
  • Attend the meeting
  • Present at the scheduled time


Review and program placement

  • To ensure a high-quality conference, all submissions will be assessed by the conference chair/editor for technical merit and suitability of content
  • Conference chairs/editors and/or SPIE staff reserve the right to reject for presentation any paper that does not meet content or presentation expectations
  • Final placement in an oral or poster session is subject to chair discretion


Publication of Proceedings in the SPIE Digital Library

Increase your professional visibility and publish in the world's largest collection of optics and photonics research. Your peers access approximately 18 million papers, presentations, and posters from the SPIE Digital Library each year.

  • Only manuscripts, presentations, and posters presented at the conference and received according to publication guidelines and due dates will be published in the Proceedings of SPIE in the SPIE Digital Library
  • Manuscripts, presentations, and posters will be officially published after the event in the SPIE Digital Library
  • Conference chairs/editors or SPIE staff may require revision before approving publication and reserve the right to reject for publication any manuscript or presentation that does not meet acceptable standards for a scientific publication
  • Conference chair/editor and/or SPIE staff decision to accept or reject a manuscript, presentation, or poster for publication is final
  • Authors must be authorized to provide a suitable publication license to SPIE; authors retain copyright of all scientific material
  • Authors must be able to confirm that all clearances, authorizations, and licenses needed for submission and publication of this paper have been obtained and all reused work is properly cited
  • SPIE retains rights to distribute and market the official SPIE recording of the presentation and/or submitted poster
  • SPIE partners with relevant scientific databases and indexes to enable researchers to easily find papers published in the Proceedings of SPIE. The databases that abstract and index these papers include Astrophysical Data System (ADS), Ei Compendex, CrossRef, Google Scholar, Inspec, Scopus, and Web of Science
  • More publication information is available in the SPIE Digital Library


Contact information

Questions? Contact the SPIE staff coordinator listed in your spie.org account.

For questions about the event, program, your presentation, and/or submitting an abstract, contact your conference program coordinator.

For questions about submitting for, and publication on, the SPIE Digital Library, contact your proceedings coordinator.