Although registration has now closed, we look forward to seeing you next year! Save the dates: 21 - 25 September 2025.
Stay connected and sign up to be notified about SPIE Photomask Technology + EUV Lithography.
NOTE: Join as an SPIE Member to save more than the cost of an annual Membership with a single event registration. Purchase your Membership during check-out.
| Purchase Membership and save! | ||
| SPIE Member | Non-Member | |
| Speaker or author, program committee, session chair | $1,140 | $1,300 |
| Non-author attendee | $1,140 | $1,300 |
| Student | $640 | $1,300 |
| Booth staff (must be with exhibiting company) | Free | Free |
| Exhibition visitor | Free | Free |
| Technical program | Exhibition visitor | |
| All presentations, plenaries, and special events | ✔ | |
| Annual Gala at Portola Hotel & Spa* | ✔ | |
| 50 proceedings downloads** | ✔ | |
| Exhibition |
✔ | ✔ |
*Guest admission tickets for the Annual Gala at Portola can be purchased separately for $125.
**Proceedings are fully published on the SPIE Digital Library by six weeks after the event; SPIE will email notification and instructions at this time.
SPIE Members and SPIE Student Members receive special rates for conference registration. Discounts are applied at the time of registration.
SPIE Student Member registration rates are available only to undergraduate and graduate students who have not yet received their PhD or MD. Post-docs may not join SPIE as a Student Member.
Not an SPIE Member? Purchase Membership with your registration and receive your discount right away. Or contact membership@spie.org for more information.
There is a $75 USD service charge for processing refunds for conference or course registrations. Requests for refunds must be received by 13 September 2024; all registration fees will be forfeited after this date. Membership dues and special events are not refundable.
US Government credit card users: have your purchasing officer contact the credit card company and get prior authorization before attempting to register. Advise your purchasing agent that SPIE is considered a 8398 company for authorization purposes.
Email: customerservice@spie.org
Phone: +1 360 676 3290 or +1 888 504 8171
Fax: +1 360 647 1445
Hours of operation:
8:00 AM–5:00 PM PT, Monday–Friday
Universal time:
15:00–01:00 November–March
14:00–00:00 April–October