Although registration has now closed, we look forward to seeing you next year! Save the dates: 21 - 25 September 2025.
Stay connected and sign up to be notified about SPIE Photomask Technology + EUV Lithography.
NOTE: Join as an SPIE Member to save more than the cost of an annual Membership with a single event registration. Purchase your Membership during check-out.
| Purchase Membership and save! | ||
| SPIE Member | Non-Member | |
| Speaker or author, program committee, session chair | $1,140 | $1,300 |
| Non-author attendee | $1,140 | $1,300 |
| Student | $640 | $1,300 |
| Booth staff (must be with exhibiting company) | Free | Free |
| Exhibition visitor | Free | Free |
| Technical program | Exhibition visitor | |
| All presentations, plenaries, and special events | ✔ | |
| Annual Gala at Portola Hotel & Spa* | ✔ | |
| 50 proceedings downloads** | ✔ | |
| Exhibition |
✔ | ✔ |
*Guest admission tickets for the Annual Gala at Portola can be purchased separately for $125.
**Proceedings are fully published on the SPIE Digital Library by six weeks after the event; SPIE will email notification and instructions at this time.
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SPIE Student Member registration rates are available only to undergraduate and graduate students who are enrolled full time and have not yet received their PhD. Post-docs may not join SPIE as a Student Member.
Not an SPIE Member? Purchase Membership with your registration and receive your discount right away. Or contact membership@spie.org for more information.
There is a $75 USD service charge for processing refunds for conference or course registrations. Requests for refunds must be received by 13 September 2024; all registration fees will be forfeited after this date. Membership dues and special events are not refundable.
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