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    Past Event Overview

    The second SPIE Lithography Asia conference featured presentations from leading researchers, developers, and innovators, and built on last year’s very successful conference.SPIE Lithography Asia - Taiwan
    View 2009 program details:
     •Event Slideshow (PowerPoint)
     •Printable Final Technical Program (PDF)
     •Technical Program online
     •Complete Conference Abstracts (PDF)
    Attendees enjoyed the outstanding plenary presentations from these industry leaders:
     •Dr. Burn Lin, Senior Director, TSMC
     •Dr. Kinam Kim, Executive VP and General Manager of R&D, Samsung
     •Dr. Christopher J. Progler, Chief Technology Officer, Photronics, Inc.
     •Dr. Cheng-Wen Wu, Director, ETRI Taiwan

    Symposium Chairs:


    Alek C. Chen
    ASML Taiwan Ltd.


    Woo-Sung Han
    Samsung Electronics Co. Ltd.


    Burn Lin
    Taiwan Semiconductor
    Manufacturing Co. Ltd.

    Anthony Yen
    Taiwan Semiconductor
    Manufacturing Co. Ltd.


    Conference topics include:

    Emerging Lithographic Technology and Nanofabrication

     
  • Optical lithography extension (shorter than 157 nm)
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  • EUV lithography
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  • E- and ion- beam technology
  •  
  • Nano-imprint lithography
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  • Application on nanostructures
  • Optical Microlithography

     
  • ArF immersion lithography
  •  
  • RET technology
  •  
  • Double exposure/double patterning lithography
  •  
  • OPC modeling
  •  
  • Photo cluster automation
  • Advances in Resist Material and Processing

     
  • Emerging resist materials
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  • Advancement in immersion resists
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  • Resist process optimizations
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  • Resist material for LCD application
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  • Double exposure material
  • Metrology, Inspection, and Process Control

     
  • Advancement in CD metrology
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  • Advancement in overlay metrology
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  • Advancement in defect inspection
  •  
  • Process control for CD and overlay
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  • Emerging metrology technology
  • LCD Application

     
  • Imaging technology
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  • Process control
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  • Material technology
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  • Automation and productivity