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23 - 27 February 2025
San Jose, California, US

SPIE Advanced Lithography + Patterning Technical Events

Focused meetings on topics related to the conference program

Plenary and Technical Events

Come hear presentations from leading speakers across the globe. Plenary sessions include world-class speakers, and the poster session brings together new and innovative ideas.

Attendee of technical event at SPIE Advanced Lithography
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24 February 2025 • 8:00 AM - 9:40 AM PST | Conv. Ctr., Grand Ballroom 220A 
Join us for the symposium welcome, awards presentations, and plenary talks.
25 February 2025 • 8:20 AM - 10:00 AM PST | Conv. Ctr., Grand Ballroom 220A 
Please join us for the presentation of new SPIE Fellows and plenary presentations by Subramanian S. Iyer and Heike Riel.
26 February 2025 • 5:30 PM - 7:00 PM PST | Conv. Ctr., Hall 2 
Conference attendees are invited to attend the SPIE Advanced Lithography + Patterning Poster Session on Wednesday evening. Come view the posters, enjoy light refreshments, ask questions, and network with colleagues in your field.