23 - 27 February 2025
San Jose, California, US

Advanced Lithography + Patterning program

Make plans to be a part of the gathering by sharing your research

A program of innovation

Each year this important community comes together to share and discuss current research, hear the latest breakthroughs, and connect with colleagues. Six conferences highlight valuable topics important to advancing the semiconductor industry. Special events provide ample time for networking and connecting with experts. Courses extend the learning opportunity with in-person instruction.

Technologies and applications

  • Extreme ultraviolet (EUV) lithography
  • Novel patterning technologies: semiconductors, MEMS, NEMS, MOEMS
  • Metrology, inspection, and process control for microlithography
  • Advances in patterning materials and processes; optical microlithography
  • Design-process-technology co-optimization for manufacturability
  • Advanced etch technology and process integration for nanopatterning
Lithography in action creates a rainbow of colors

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