The SPIE Frits Zernike Award for Microlithography is presented for outstanding accomplishments in microlithographic technology, especially those furthering the development of semiconductor lithographic imaging and patterning solutions. Honorarium $2,000.
Frits Zernike (July 16, 1888 - March 10, 1966) was a Dutch chemist, physicist and mathematician who won the Nobel Prize for physics in 1953 for his invention of the phase-contrast microscope. He discovered that ghost lines that occur to the left and right of each primary line in spectra created by means of a diffraction grating, have their phase shifted from that of the primary line by 90 degrees, leading to his phase contrast technique in microscopy. His orthogonal circle polynomials provided a solution to the optimum 'balancing' problem of aberrations in optical instruments.
For three decades of contributions in advancing microlithography technology, including developing extreme-ultraviolet lithography for high-volume manufacture of semiconductor integrated circuits.
2022 - Harry Levinson
2021 - Bruce Smith
2020 - Winfried Kaiser
2019 - Obert Wood II, Akiyoshi Suzuki
2017 - Donis Flagello
2016 - Yan Borodovsky
2015 - Ralph Dammel
2014 - Mordechai Rothschild
2013 - David Markle
2012 - John Bruning
2011 - Andrew R. Neureuther
2010 - Marc D. Levenson
2009 - Chris Mack
2008 - Martin van den Brink
2007 - David Williamson
2006 - Timothy Brunner
2005 - C. Grant Willson
2004 - Burn J. Lin